I、Silicon Methane (SiH4) Gas Analyzer Functional Specifications  

•  The composition of the analyte and the minimum detectable concentration (MDL)：H2, Ar+O2, N2, CH4, CO, CO2.  MDL is 10~30 ppb.
•  The relative standard deviation (RSD) of the five-repeated analysis of the standard composition of the analyte (5ppm)：<3%.

  II、Silicon Methane (SiH4) Gas Analyzer Hardware Specifications  

    A. Chromatography System

•  Electronic Flow Control (EPC)：Accurate to 0.001 psi, it is the standard specification for carrier gas, detector flow, auxiliary gas, backflush gas and core cut gas (heart cut). It can control the flow of 16 channels. flow or pressure.
•  Analytical component retention time error：<0.0008 minutes.
•  Oven temperature operating range and accuracy：room temperature +4 ℃ ~ 450 ℃, 0.01 ℃ control accuracy.
•  3 detectors can be configured.

   B. Detectors and Control Systems

      1. Pulse Discharge Detector(PDHID)：

•  Universal non-destructive helium photoionization detection mode.
•  Helium photon energy：13.5~17.7eV.
•  Minimum detection volume：low ppb and can analyze non-corrosive or corrosive gases.
•  Linear range: greater than 10⁵.