I、Electronic Grade Special (Multi Mix) Gas Analyzers Functional Specifications  

• Analysable single gas species：nitrogen trifluoride (NF3), sulfur hexafluoride (SF6), nitrous oxide (N2O), chlorine (Cl2), ammonia (NH3), silicon methane (SiH4), hexafluoro Ethane (C2F6), octafluoropropane (C3F8), various mixed gases.
• The composition of the analyte and the lowest detectable concentration (QDL)：H2, Ar, N2, CH4, CO, CO2, N2O. QDL is <10ppb.
• Total Hydrocarbons (THC) Minimum Detectable Concentration (QDL)： <10ppb.
• The relative standard deviation (RSD) of the five-repeated analysis of the standard composition of the analyte (5ppm)：1~2%.

  II、Electronic Grade Special (Multi Mix) Gas Analyzer Hardware Specifications  

   A. Chromatography System

• Electronic Flow Control (EPC)：Accurate to 0.001 psi, it is the standard specification for carrier gas, detector flow, auxiliary gas, backflush gas and core cut gas (heart cut). It can control the flow of 16 channels. flow or pressure.
• Analytical component retention time error：<0.0008 minutes.
• Oven temperature operating range and accuracy：room temperature +4 ℃ ~ 450 ℃, 0.01 ℃ control accuracy.
• 3 detectors can be configured.

   B. Detectors and Control Systems

     1. Pulse Discharge Detector(PDHID)：

• Universal non-destructive helium photoionization detection mode.
• Helium photon energy：13.5~17.7eV.
• Minimum detection volume：low ppb and can analyze non-corrosive or corrosive gases.
• Linear range：greater than 10⁵.

     2. Flame Ionization Detector(FID)：

• Electronic Flow Control (EPC)：Controls the flow of hydrogen, air, make-up gas.
• 最Minimum detection volume：less than or equal to 1.8pg (10^-12g) carbon/sec, linear dynamic range: ≧10⁷.

     3. Thermal Conductivity Detector(TCD)：

• Electronic Flow Control (EPC)：Controls the flow of reference gas, make-up gas.
• Minimum detection volume：better than 400x10^-12g hydrocarbons/ml, linear dynamic range 10⁵.
• Programmable setting of signal change output time.